Experimental and Finite-Element Study of Convective Accelerometer on CMOS
Résumé
This paper addresses the design of CMOS thermal accelerometers. A test-chip including the sensor and a signal conditioning circuit has been designed, fabricated and characterized. The obtained sensitivity is 375mV/g while resolution is estimated at 30mg. This test-chip is used to improve the modelling of heat transfer phenomenon in theses devices. FEM is successfully used as a first modelling approach.
Loading...