A CMOS MEMS Accelerometer with Bulk Micromachining
Résumé
Due to the lack of important seismic mass, CMOS-FSBM cantilevers have never been carefully considered for intertial sensing. This paper demonstrates that such beams can be used for acceleration measurement. A dedicated cantilever has been designed and fabricated. experimental results have demonstrated a sensitivity of about 22.4 mV/g.
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