Micromachined accelerometer based on convection heat transfer, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176), pp.25-29, 1998. ,
DOI : 10.1109/MEMSYS.1998.659830
Micromachined convective accelerometers in standard integrated circuits technology, Applied Physics Letters, vol.76, issue.4, pp.508-510, 2000. ,
DOI : 10.1063/1.125803
An optimized micromachined convective accelerometer with no proof mass, Journal of Micromechanics and Microengineering, vol.11, issue.5, pp.504-508, 2001. ,
DOI : 10.1088/0960-1317/11/5/309
Micromachined thermal accelerometer, Sensors and Actuators A: Physical, vol.103, issue.3, pp.359-363, 2003. ,
DOI : 10.1016/S0924-4247(02)00428-4
URL : https://hal.archives-ouvertes.fr/hal-00327192
Experimental and Finite Element Study of Convective Accelerometer on CMOS " ; proc, EUROSENSORS'05, pp.11-14, 2005. ,