Towards On-Line Testing of MEMS Using Electro-Thermal Excitation - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2005
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lirmm-00106009 , version 1 (13-10-2006)

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  • HAL Id : lirmm-00106009 , version 1

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Frédérick Mailly, Florence Azaïs, Norbert Dumas, Laurent Latorre, Pascal Nouet. Towards On-Line Testing of MEMS Using Electro-Thermal Excitation. ETS: European Test Symposium, May 2005, Tallinn, Estonia. pp.76-81. ⟨lirmm-00106009⟩
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