Towards On-Line Testing of MEMS Using Electro-Thermal Excitation - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Papers Year : 2005

Towards On-Line Testing of MEMS Using Electro-Thermal Excitation

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Micro and nanotechnologies/Microelectronics

Christine Carvalho De Matos  : Connect in order to contact the contributor

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00106009

Submitted on : Friday, October 13, 2006-10:22:46 AM

Last modification on : Friday, March 24, 2023-2:52:48 PM

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lirmm-00106009 , version 1 (13-10-2006)

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  • HAL Id : lirmm-00106009 , version 1

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Frédérick Mailly, Florence Azaïs, Norbert Dumas, Laurent Latorre, Pascal Nouet. Towards On-Line Testing of MEMS Using Electro-Thermal Excitation. ETS: European Test Symposium, May 2005, Tallinn, Estonia. pp.76-81. ⟨lirmm-00106009⟩

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