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Towards On-Line Testing of MEMS Using Electro-Thermal Excitation

Frédérick Mailly 1 Florence Azaïs 1 Norbert Dumas 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
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Submitted on : Friday, October 13, 2006 - 10:22:46 AM
Last modification on : Monday, October 11, 2021 - 1:24:11 PM


  • HAL Id : lirmm-00106009, version 1



Frédérick Mailly, Florence Azaïs, Norbert Dumas, Laurent Latorre, Pascal Nouet. Towards On-Line Testing of MEMS Using Electro-Thermal Excitation. ETS: European Test Symposium, May 2005, Tallinn, Estonia. pp.76-81. ⟨lirmm-00106009⟩



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