H. Baltes, O. Brand, A. Hierlemann, D. Lange, and C. Hagleitner, CMOS MEMS - present and future, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), pp.20-24459, 2002.
DOI : 10.1109/MEMSYS.2002.984302

URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=

V. Beroulle, Y. Bertrand, L. Latorre, and P. Nouet, Monolithic piezoresistive CMOS magnetic field sensors, Sensors and Actuators A: Physical, vol.103, issue.1-2, pp.23-32, 2003.
DOI : 10.1016/S0924-4247(02)00317-5

L. Latorre, P. Nouet, Y. Bertrand, P. Hazard, and F. Pressecq, Characterization and modeling of a CMOS-compatible MEMS technology, Sensors and Actuators A: Physical, vol.74, issue.1-3, pp.1-3, 1999.
DOI : 10.1016/S0924-4247(98)00345-8

N. Hossain, J. Ju, B. Warneke, and K. S. Pister, Characterization of the Young's Modulus of CMOS Thin Films", symposium on Mechanical Properties of Structural Films, 2000.

P. Neuzil and T. Mei, A method of suppressing selfheating signal of bolometers, IEEE Sensors Journal, vol.4, issue.2, 2004.