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Journal Articles IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems Year : 2004

Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach

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lirmm-00108542 , version 1 (23-10-2006)

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Laurent Latorre, Vincent Beroulle, Pascal Nouet. Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2004, 23 (6), pp.962-967. ⟨10.1109/TCAD.2004.828113⟩. ⟨lirmm-00108542⟩
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