Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach

Laurent Latorre; Vincent Beroulle; Pascal Nouet

Journal articles

Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach

Laurent Latorre ¹ Vincent Beroulle ² Pascal Nouet ¹

1 SysMIC - Conception et Test de Systèmes MICroélectroniques

LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier

2 LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier

Résumé : N/A

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Other

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00108542
Contributor : Christine Carvalho de Matos <>
Submitted on : Monday, October 23, 2006 - 7:43:07 AM
Last modification on : Wednesday, January 1, 2020 - 6:46:01 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 8:27:06 PM

Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach

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Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach

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