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Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00108542
Contributor : Christine Carvalho de Matos <>
Submitted on : Monday, October 23, 2006 - 7:43:07 AM
Last modification on : Wednesday, January 1, 2020 - 6:46:01 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 8:27:06 PM

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Laurent Latorre, Vincent Beroulle, Pascal Nouet. Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, IEEE, 2004, 23 (6), pp.962-967. ⟨lirmm-00108542⟩

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