Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Journal Articles IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems Year : 2004

Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach

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Other Micro and nanotechnologies/Microelectronics
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Submitted on : Monday, October 23, 2006-7:43:07 AM

Last modification on : Friday, March 24, 2023-2:52:48 PM

Long-term archiving on : Tuesday, April 6, 2010-8:27:06 PM

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lirmm-00108542 , version 1 (23-10-2006)

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Laurent Latorre, Vincent Beroulle, Pascal Nouet. Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2004, 23 (6), pp.962-967. ⟨10.1109/TCAD.2004.828113⟩. ⟨lirmm-00108542⟩

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