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Journal Articles IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems Year : 2004

Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach

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Engineering Sciences [physics] Other Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00108542

Submitted on : Monday, October 23, 2006-7:43:07 AM

Last modification on : Thursday, October 13, 2022-8:19:45 AM

Long-term archiving on: Tuesday, April 6, 2010-8:27:06 PM

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lirmm-00108542 , version 1 (23-10-2006)

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  • HAL Id : lirmm-00108542 , version 1

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Laurent Latorre, Vincent Beroulle, Pascal Nouet. Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2004, 23 (6), pp.962-967. ⟨lirmm-00108542⟩

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