Electro-thermal stimuli for MEMS testing in FSBM technology - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Journal Articles Journal of Electronic Testing: : Theory and Applications Year : 2006

Electro-thermal stimuli for MEMS testing in FSBM technology

Dates and versions

lirmm-00112942 , version 1 (10-11-2006)

Identifiers

Cite

Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet. Electro-thermal stimuli for MEMS testing in FSBM technology. Journal of Electronic Testing: : Theory and Applications, 2006, 22 (2), pp.189-198. ⟨10.1007/s10836-005-6132-7⟩. ⟨lirmm-00112942⟩
48 View
0 Download

Altmetric

Share

Gmail Facebook X LinkedIn More