Skip to Main content Skip to Navigation
Journal articles

Electro-thermal stimuli for MEMS testing in FSBM technology

Norbert Dumas 1 Florence Azaïs 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Document type :
Journal articles
Complete list of metadatas
https://hal-lirmm.ccsd.cnrs.fr/lirmm-00112942
Contributor : Florence Azais <>
Submitted on : Friday, November 10, 2006 - 12:58:18 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

Identifiers

  • HAL Id : lirmm-00112942, version 1

Collections

CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

Citation

Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet. Electro-thermal stimuli for MEMS testing in FSBM technology. Journal of Electronic Testing, Springer Verlag, 2006, 22 (2), pp.189-198. ⟨lirmm-00112942⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

92