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Electro-thermal stimuli for MEMS testing in FSBM technology

Norbert Dumas 1 Florence Azaïs 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00112942
Contributor : Florence Azais Connect in order to contact the contributor
Submitted on : Friday, November 10, 2006 - 12:58:18 PM
Last modification on : Friday, October 22, 2021 - 3:07:36 PM

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  • HAL Id : lirmm-00112942, version 1

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

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Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet. Electro-thermal stimuli for MEMS testing in FSBM technology. Journal of Electronic Testing, Springer Verlag, 2006, 22 (2), pp.189-198. ⟨lirmm-00112942⟩

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