Instantaneous de-embedding of the on-wafer Equivalent-Circuit Parameters of Acoustic Resonator (FBAR) for Integrated Circuit Applications

Abstract : An algorithm for the automatic de-embedding of equivalent-circuit-parameter in thin-film bulk acoustic wave resonators (FBAR), and its application to RF circuit design are presented. First, we developed a technology process for the fabrication of FBARs. Next, we extracted the on-wafer equivalent-circuit-parameters of the FBAR, from experimental measurements. The extracted values were implemented in the design of an RF application. For that purpose, a 2.4GHz CMOS oscillator was designed and fabricated. FBAR characterization and extraction results are shown, and the basis of an integrated test vehicle for complete mechanical and piezoelectric parameter extraction is discussed.