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Instantaneous de-embedding of the on-wafer Equivalent-Circuit Parameters of Acoustic Resonator (FBAR) for Integrated Circuit Applications

Humberto Campanella 1 Arantxa Uranga 2 Pascal Nouet 3 Pedro de Paco 4 Nuria Barniol 4 Jaume Esteve 1
1 CNM - Centro Nacional de Microelectronica [Spain]
2 Electronics Engineering Department
3 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
4 Telecommunications Engineering Department
Abstract : An algorithm for the automatic de-embedding of equivalent-circuit-parameter in thin-film bulk acoustic wave resonators (FBAR), and its application to RF circuit design are presented. First, we developed a technology process for the fabrication of FBARs. Next, we extracted the on-wafer equivalent-circuit-parameters of the FBAR, from experimental measurements. The extracted values were implemented in the design of an RF application. For that purpose, a 2.4GHz CMOS oscillator was designed and fabricated. FBAR characterization and extraction results are shown, and the basis of an integrated test vehicle for complete mechanical and piezoelectric parameter extraction is discussed.
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Conference papers
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00203350
Contributor : Martine Peridier <>
Submitted on : Wednesday, January 9, 2008 - 4:40:57 PM
Last modification on : Friday, June 7, 2019 - 5:39:09 PM

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

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Humberto Campanella, Arantxa Uranga, Pascal Nouet, Pedro de Paco, Nuria Barniol, et al.. Instantaneous de-embedding of the on-wafer Equivalent-Circuit Parameters of Acoustic Resonator (FBAR) for Integrated Circuit Applications. SBCCI: Symposium on Integrated Circuits and Systems Design, Sep 2007, Copacabana, Rio de Janeiro, Brazil. pp.212-217, ⟨10.1145/1284480.1284539⟩. ⟨lirmm-00203350⟩

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