Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate

Humberto Campanella 1 Pascal Nouet 2 Arantxa Uranga 3 Pedro de Paco 4 Nuria Barniol 4 Jaume Esteve 1
1 CNM - Centro Nacional de Microelectronica [Spain]
2 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
3 Electronics Engineering Department
4 Telecommunications Engineering Department
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Journal articles
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00203576
Contributor : Martine Peridier <>
Submitted on : Thursday, January 10, 2008 - 3:06:45 PM
Last modification on : Thursday, August 16, 2018 - 11:44:02 AM

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

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Humberto Campanella, Pascal Nouet, Arantxa Uranga, Pedro de Paco, Nuria Barniol, et al.. Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate. Microwave and Optical Technology Letters, Wiley, 2008, 50 (1), pp.4-7. ⟨10.1002/mop.22986⟩. ⟨lirmm-00203576⟩

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