Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Journal Articles Microwave and Optical Technology Letters Year : 2008

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lirmm-00203576 , version 1 (10-01-2008)

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Humberto Campanella, Pascal Nouet, Arantxa Uranga, Pedro de Paco, Nuria Barniol, et al.. Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate. Microwave and Optical Technology Letters, 2008, 50 (1), pp.4-7. ⟨10.1002/mop.22986⟩. ⟨lirmm-00203576⟩
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