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Journal articles
Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate
Humberto Campanella
1
Pascal Nouet
2
Arantxa Uranga
3
Pedro de Paco
4
Nuria Barniol
4
Jaume Esteve
1
2
SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Humberto Campanella 1
Author
Pascal Nouet 2
Author IdHAL : pascal-nouet ORCID : https://orcid.org/0000-0003-2137-2623
Arantxa Uranga 3
Author
Pedro de Paco 4
Author
Nuria Barniol 4
Author
Jaume Esteve 1
Author
1
CNM - Centro Nacional de Microelectronica [Spain] (Campus Universidad Autónoma de Barcelona - 08193 Bellaterra, Barcelona - Spain)
2
SysMIC - Conception et Test de Systèmes MICroélectroniques (France)
- LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier (161 rue Ada - 34095 Montpellier - France)
- UM - Université de Montpellier : UMR5506 (163 rue Auguste Broussonnet - 34090 Montpellier - France)
- CNRS - Centre National de la Recherche Scientifique : UMR5506 (France)
3
Electronics Engineering Department (Bellaterra - Spain)
- UAB - Universitat Autònoma de Barcelona (UAB Campus 08193 Bellaterra Barcelona - Spain)
4
Telecommunications Engineering Department (Bellaterra - Spain)
- UAB - Universitat Autònoma de Barcelona (UAB Campus 08193 Bellaterra Barcelona - Spain)
Document type :
Journal articles
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00203576
Contributor : Martine Peridier <>
Submitted on : Thursday, January 10, 2008 - 3:06:45 PM
Last modification on : Monday, March 29, 2021 - 11:50:03 AM
Contributor : Martine Peridier <>
Submitted on : Thursday, January 10, 2008 - 3:06:45 PM
Last modification on : Monday, March 29, 2021 - 11:50:03 AM
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- HAL Id : lirmm-00203576, version 1
- DOI : 10.1002/mop.22986
Citation
Humberto Campanella, Pascal Nouet, Arantxa Uranga, Pedro de Paco, Nuria Barniol, et al.. Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate. Microwave and Optical Technology Letters, Wiley, 2008, 50 (1), pp.4-7. ⟨10.1002/mop.22986⟩. ⟨lirmm-00203576⟩
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