Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Journal Articles Microwave and Optical Technology Letters Year : 2008

Dates and versions

lirmm-00203576 , version 1 (10-01-2008)

Identifiers

Cite

Humberto Campanella, Pascal Nouet, Arantxa Uranga, Pedro de Paco, Nuria Barniol, et al.. Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate. Microwave and Optical Technology Letters, 2008, 50 (1), pp.4-7. ⟨10.1002/mop.22986⟩. ⟨lirmm-00203576⟩
151 View
0 Download

Altmetric

Share

More