Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Journal Articles Microwave and Optical Technology Letters Year : 2008

Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate

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Micro and nanotechnologies/Microelectronics

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00203576

Submitted on : Thursday, January 10, 2008-3:06:45 PM

Last modification on : Wednesday, March 6, 2024-9:16:32 AM

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lirmm-00203576 , version 1 (10-01-2008)

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Humberto Campanella, Pascal Nouet, Arantxa Uranga, Pedro de Paco, Nuria Barniol, et al.. Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate. Microwave and Optical Technology Letters, 2008, 50 (1), pp.4-7. ⟨10.1002/mop.22986⟩. ⟨lirmm-00203576⟩

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