Testing Reasonant Micro-Electro-Mechanical Sensors Using the Oscillation-Based Test Methodology - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Papers Year : 2002

Testing Reasonant Micro-Electro-Mechanical Sensors Using the Oscillation-Based Test Methodology

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Micro and nanotechnologies/Microelectronics

Christine Carvalho De Matos  : Connect in order to contact the contributor

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00269323

Submitted on : Wednesday, April 2, 2008-4:46:00 PM

Last modification on : Friday, March 24, 2023-2:52:50 PM

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lirmm-00269323 , version 1 (02-04-2008)

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  • HAL Id : lirmm-00269323 , version 1

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Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet. Testing Reasonant Micro-Electro-Mechanical Sensors Using the Oscillation-Based Test Methodology. LATW 2002 - 3rd IEEE Latin American Test Workshop, Feb 2002, Montevideo, Uruguay. pp.99-104. ⟨lirmm-00269323⟩

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