Impact of Environmental Parameters on CMOS MEMS Structures - Archive ouverte HAL Access content directly
Conference Papers Year : 2002

Impact of Environmental Parameters on CMOS MEMS Structures

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Dates and versions

lirmm-00269356 , version 1 (02-04-2008)

Identifiers

  • HAL Id : lirmm-00269356 , version 1

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Muriel Dardalhon, Marc-Olivier Dzeukou, Vincent Beroulle, Laurent Latorre, Pascal Nouet, et al.. Impact of Environmental Parameters on CMOS MEMS Structures. CANEUS, Aug 2002, Montreal, Canada. ⟨lirmm-00269356⟩
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