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Impact of Environmental Parameters on CMOS MEMS Structures

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00269356
Contributor : Christine Carvalho de Matos <>
Submitted on : Wednesday, April 2, 2008 - 4:46:09 PM
Last modification on : Friday, September 18, 2020 - 6:48:01 PM

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  • HAL Id : lirmm-00269356, version 1

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Muriel Dardalhon, Marc-Olivier Dzeukou, Vincent Beroulle, Laurent Latorre, Pascal Nouet, et al.. Impact of Environmental Parameters on CMOS MEMS Structures. CANEUS, Aug 2002, Montreal, Canada. ⟨lirmm-00269356⟩

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