A Novel SCR-Based Protection Structure Against ESD with Efficient Multi-Finger Triggering
Abstract
In this paper, a new SCR-based protection structure is presented relying on the bimodal operation of an LSCR. STMSCR (smart triggered multi-finger SCR) is multi-finger compliant, thus allowing area-efficient design of pad-located ESD protection. Without any process customisation, an HBM failure threshold over 115 V//spl mu/m is reached for the first time while always ensuring current uniformity in multi-finger structures.
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