Rejection of Power Supply Noise in Wheatstone Bridges: Application to Piezoresistive MEMS

Abstract : This paper deals with the design of MEMS using piezoresistivity as transduction principle. It is demonstrated that when the sensor topology doesn't allow a perfect matching of strain gauges, the resolution is limited by the ability of the conditioning circuit (typically a Wheatstone bridge) to reject power supply noise. As this ability is strongly reduced when an offset voltage is present at the output of the bridge, the proposed architecture implements a feedback loop to control MOS transistors inserted in the Wheatstone bridge to compensate resistor mismatches. This feedback exhibits a very good offset cancellation and therefore a better resolution is achieved.
keyword : MEMS
Type de document :
Communication dans un congrès
DTIP'08: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Apr 2008, Nice, France, EDA Publishing Association, pp.96-99, 2008
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00333640
Contributeur : Frédérick Mailly <>
Soumis le : jeudi 23 octobre 2008 - 17:01:10
Dernière modification le : jeudi 24 mai 2018 - 15:59:24

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  • HAL Id : lirmm-00333640, version 1

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El Mehdi Boujamaa, Yannick Soulie, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Rejection of Power Supply Noise in Wheatstone Bridges: Application to Piezoresistive MEMS. DTIP'08: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Apr 2008, Nice, France, EDA Publishing Association, pp.96-99, 2008. 〈lirmm-00333640〉

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