Low power wireless readout of autonomous sensor wafer using MEMS grating light modulator, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399), pp.67-68, 2000. ,
DOI : 10.1109/OMEMS.2000.879629
Wireless micromachined ceramic pressure sensor for high-temperature applications, Journal of Microelectromechanical Systems, vol.11, issue.4, pp.337-343, 2002. ,
DOI : 10.1109/JMEMS.2002.800939
Flexible wireless passive pressure sensors for biomedical applications, Proc. Tech. Dig. Solid-State, pp.37-42, 2006. ,
Wireless chemical sensors for high temperature environments, Proc. Tech. Dig. Solid-State, pp.212-215, 2006. ,
Micro-power wireless transmitter for high-temperature MEMS sensing and communication applications, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), pp.641-644, 2002. ,
DOI : 10.1109/MEMSYS.2002.984352
Wireless bimorph micro-actuators by pulsed laser heating, Sensors and Actuators A: Physical, vol.121, issue.1, pp.35-43, 2005. ,
DOI : 10.1016/j.sna.2004.12.012
Bent-beam electro-thermal actuators for high force applications, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), pp.31-36, 1999. ,
DOI : 10.1109/MEMSYS.1999.746747
Bent-beam electrothermal actuators?Part I: Single beam and cascaded devices, J. Microelectromech . Syst, vol.10, issue.2, pp.247-254, 2001. ,
Bent-beam electrothermal actuators-Part II: Linear and rotary microengines, Journal of Microelectromechanical Systems, vol.10, issue.2, pp.255-262, 2001. ,
DOI : 10.1109/84.925774
Impact Behavior and Energy Transfer Efficiency of Pulse-Driven Bent-Beam Electrothermal Actuators, Journal of Microelectromechanical Systems, vol.15, issue.1, pp.101-110, 2006. ,
DOI : 10.1109/JMEMS.2005.863696
Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators, Sensors and Actuators A: Physical, vol.128, issue.1, pp.165-175, 2006. ,
DOI : 10.1016/j.sna.2005.12.033
Bent-beam strain sensors, Journal of Microelectromechanical Systems, vol.5, issue.1, pp.52-58, 1996. ,
DOI : 10.1109/84.485216
Measurements of material properties using differential capacitive strain sensors, Journal of Microelectromechanical Systems, vol.11, issue.5, pp.489-498, 2002. ,
DOI : 10.1109/JMEMS.2002.803277
"Bent beam" MEMS Temperature Sensors for Contactless Measurements in Harsh Environments, 2008 IEEE Instrumentation and Measurement Technology Conference, pp.1930-1934, 2008. ,
DOI : 10.1109/IMTC.2008.4547363
An hybrid telemetric MEMS for high temperature measurement into harsh industrial environment, Proc. IEEE I 2 MTC, pp.1423-1428, 2009. ,
Introduction to MEMSCAP and MUMPs ,
Mechanics of Microelectromechanical Systems, pp.368-379, 2004. ,
Available: http://www. coventor.com/pdfs, Sensors and Signal Conditioning, 2001. ,
Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators, Sensors and Actuators A: Physical, vol.128, issue.1, pp.165-175, 2006. ,
DOI : 10.1016/j.sna.2005.12.033
A Simplex Method for Function Minimization, The Computer Journal, vol.7, issue.4, pp.308-313, 1960. ,
DOI : 10.1093/comjnl/7.4.308
Design of Planar Rectangular Microelectronic Inductors, IEEE Transactions on Parts, Hybrids, and Packaging, vol.10, issue.2, pp.101-109, 1974. ,
DOI : 10.1109/TPHP.1974.1134841