Contactless measurement of torque, Mechatronics, vol.12, issue.8, pp.1023-1033, 2002. ,
DOI : 10.1016/S0957-4158(02)00010-7
Contactless laser bending of silicon microstructures, Smart Sensors, Actuators, and MEMS, pp.383-392, 2003. ,
DOI : 10.1117/12.498961
Development of contactless resonant MEMS force sensors in SOI technology, Proceeding of Eurosensors, 2008. ,
Contactless measurement of electrical conductivity of semiconductor wafers using the reflection of millimeter waves, Applied Physics Letters, vol.81, issue.19, pp.3585-3587, 2002. ,
DOI : 10.1063/1.1520339
Contactless electromagnetic excitation of resonant sensors made of conductive miniaturized structures, Sensors and Actuators A: Physical, vol.148, issue.1, pp.44-50, 2008. ,
DOI : 10.1016/j.sna.2008.06.034
Contactless Excitation and Readout of Passive Sensing Elements Made by Miniaturized Mechanical Resonators, 2007 IEEE Sensors, pp.36-39, 2007. ,
DOI : 10.1109/ICSENS.2007.4388329
Magnetically induced oscillations on a conductive cantilever for resonant microsensors, Sensors and Actuators A: Physical, vol.135, issue.1, pp.197-202, 2007. ,
DOI : 10.1016/j.sna.2006.06.049
Contactless electromagnetic interrogation of a MEMS-based microresonator used as passive sensing element, TRANSDUCERS 2009, 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp.1429-1432, 2009. ,
DOI : 10.1109/SENSOR.2009.5285811
Numerical and experimental investigation on contactless resonant sensors, Sens. Actuators A: Phys, vol.160, issue.2, pp.329-335, 2010. ,
Simulations of microelectromechanical systems, 1994. ,
Design and characterization of a microwire fluxgate magnetometer, Sensors and Actuators A: Physical, vol.151, issue.2, pp.145-153, 2009. ,
DOI : 10.1016/j.sna.2009.02.029
A Simplex Method for Function Minimization, The Computer Journal, vol.7, issue.4, pp.308-313, 1965. ,
DOI : 10.1093/comjnl/7.4.308