Investigation on the Effect of Geometrical Dimensions on the Conductive Behaviour of a MEMS Convective Accelerometer - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Papers Year : 2011

Investigation on the Effect of Geometrical Dimensions on the Conductive Behaviour of a MEMS Convective Accelerometer

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Micro and nanotechnologies/Microelectronics

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00632610

Submitted on : Friday, October 14, 2011-5:14:30 PM

Last modification on : Friday, March 24, 2023-2:52:54 PM

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lirmm-00632610 , version 1 (14-10-2011)

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  • HAL Id : lirmm-00632610 , version 1

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Ahmed Rekik, Brahim Mezghani, Florence Azaïs, Norbert Dumas, Mohamed Masmoudi, et al.. Investigation on the Effect of Geometrical Dimensions on the Conductive Behaviour of a MEMS Convective Accelerometer. DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, France. pp.14-17. ⟨lirmm-00632610⟩

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