Self-test and self-calibration of a MEMS convective accelerometer

Abstract : This paper presents an investigation of two integrated solutions that make a previously developed electrical-only test and calibration procedure, of a MEMS convective accelerometer, realizable on-chip. The idea is to integrate on-chip circuitry that performs all required measurements and evaluates an electrical test parameter on which the test and calibration procedure is based.
Type de document :
Communication dans un congrès
DTIP: Design, Test, Integration & Packaging of MEMS/MOEMS, Apr 2013, Barcelona, Spain. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 on, Barcelona, 2013, pp. 1-4. keywords: ,, pp.239-242, 2013, 〈http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6559452&isnumber=6559386〉
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00814231
Contributeur : Frédérick Mailly <>
Soumis le : mardi 16 avril 2013 - 17:04:24
Dernière modification le : jeudi 28 juin 2018 - 18:44:06

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  • HAL Id : lirmm-00814231, version 1

Citation

Ahmed Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet, Mohamed Masmoudi. Self-test and self-calibration of a MEMS convective accelerometer. DTIP: Design, Test, Integration & Packaging of MEMS/MOEMS, Apr 2013, Barcelona, Spain. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 on, Barcelona, 2013, pp. 1-4. keywords: ,, pp.239-242, 2013, 〈http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6559452&isnumber=6559386〉. 〈lirmm-00814231〉

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