Self-test and self-calibration of a MEMS convective accelerometer
Résumé
This paper presents an investigation of two integrated solutions that make a previously developed electrical-only test and calibration procedure, of a MEMS convective accelerometer, realizable on-chip. The idea is to integrate on-chip circuitry that performs all required measurements and evaluates an electrical test parameter on which the test and calibration procedure is based.
Mots clés
integrated circuit design
integrated circuit measurement
integrated circuit testing
microsensors
MEMS convective accelerometer
electrical-only test parameter
integrate on-chip circuitry
self-calibration procedure
self-testing
Accelerometers
Bridge circuits
Calibration
Heating
Micromechanical devices
Resistance
Sensitivity
Convective Accelerometer
Design for Test
MEMS