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Self-test and self-calibration of a MEMS convective accelerometer

Abstract : This paper presents an investigation of two integrated solutions that make a previously developed electrical-only test and calibration procedure, of a MEMS convective accelerometer, realizable on-chip. The idea is to integrate on-chip circuitry that performs all required measurements and evaluates an electrical test parameter on which the test and calibration procedure is based.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00814231
Contributor : Frédérick Mailly <>
Submitted on : Tuesday, April 16, 2013 - 5:04:24 PM
Last modification on : Thursday, March 5, 2020 - 5:55:01 PM

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  • HAL Id : lirmm-00814231, version 1

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Ahmed Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet, Mohamed Masmoudi. Self-test and self-calibration of a MEMS convective accelerometer. DTIP: Design, Test, Integration & Packaging of MEMS/MOEMS, Apr 2013, Barcelona, Spain. pp.239-242. ⟨lirmm-00814231⟩

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