Self-test and self-calibration of a MEMS convective accelerometer - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2013

Self-test and self-calibration of a MEMS convective accelerometer

Abstract

This paper presents an investigation of two integrated solutions that make a previously developed electrical-only test and calibration procedure, of a MEMS convective accelerometer, realizable on-chip. The idea is to integrate on-chip circuitry that performs all required measurements and evaluates an electrical test parameter on which the test and calibration procedure is based.
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Dates and versions

lirmm-00814231 , version 1 (16-04-2013)

Identifiers

  • HAL Id : lirmm-00814231 , version 1

Cite

Ahmed Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet, Mohamed Masmoudi. Self-test and self-calibration of a MEMS convective accelerometer. DTIP: Design, Test, Integration & Packaging of MEMS/MOEMS, Apr 2013, Barcelona, Spain. pp.239-242. ⟨lirmm-00814231⟩
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