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Progress on carbon nanotube BEOL interconnects

Abstract : This article is a review of the current progress and results obtained in the European H2020 CONNECT project. Amongst all the research on carbon nanotube interconnects, those discussed here cover 1) process & growth of carbon nanotube interconnects compatible with back-end-of-line integration, 2) modeling and simulation from atomistic to circuit-level bench-marking and performance prediction, and 3) characterization and electrical measurements. We provide an overview of the current advancements on carbon nanotube interconnects and also regarding the prospects for designing energy efficient integrated circuits. Each selected category is presented in an accessible manner aiming to serve as a review and informative cornerstone on carbon nanotube interconnects.
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Submitted on : Monday, May 13, 2019 - 5:01:29 PM
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Benjamin Uhlig, Jie Liang, Lee Jaehyun, Raphael Ramos, Abitha Dhavamani, et al.. Progress on carbon nanotube BEOL interconnects. DATE 2018 - 21st Design, Automation and Test in Europe Conference and Exhibition, Mar 2018, Dresden, Germany. pp.937-942, ⟨10.23919/DATE.2018.8342144⟩. ⟨lirmm-01880198⟩



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