E. Jung, 4th industrial revolution and foundry: Challenges and opportunities, IEDM, 2018.

I. Market, The internet of things: A movement, not a market, IHS Market, 2017.

D. Schor, Tsmc starts 5-nm risk production, WikiChip Fuse, 2019.

M. Maik, Interconnect trend for single digit nodes, IEDM, 2018.

L. T. Clark, Asap7: A 7-nm finfet predictive process design kit, MEJ, 2016.

, Predictive technology model, 2005.

S. Frégoneèse, Technological dispersion in cntfet: Impactof the presence of metallic carbon nanotubes in logic circuits, SSE, 2009.

A. Todri, Carbon nanotube interconnects: Process, design and applications, 2017.

R. Chen, Variability study of mwcnt local interconnects considering defects and contact resistances, IEEE TED, 2018.
URL : https://hal.archives-ouvertes.fr/lirmm-01879935

C. Lee, A compact virtual-source model for carbon nanotube fets in the sub-10-nm regime--part i and ii, IEEE TED, 2015.

, 2017) international roadmap for devices and systems

R. Jackson, Specific contact resistance at metal/carbon nanotube interfaces, APL, 2009.

C. Koechlin, Electrical characterization of devices based on carbon nanotube films, APL, vol.96, issue.10, 2010.

A. D. Franklin, Length scaling of carbon nanotube transistors, Nature nanotechnology, 2010.

N. Chiodarelli, Carbon nanotubes horizontal interconnects with end-bonded contacts, diameters down to 50 nm and lengths up to 20 ?m, Carbon, 2013.

A. Delabie, Ald of al2o3 for carbon nanotube vertical interconnect and its impact on the electrical properties, MRS, 2011.