Multi-Micro-Sensor Platform for Monitoring Toxic Algal Blooms and Pollution in Coastal Marine Waters: Transducer Integration in Micro-Technology
Abstract
This work presents the design of a multisensor platform for the in situ monitoring of physico-chemical parameters in seawater. As a result, we propose an 8.5 × 8.5 mm2 silicon chip that integrates a MOSFET and two ISFETs (Metal Oxide Semiconductor and Ion-Sensitive Field-Effect Transistor) and four microelectrodes (two Ag electrodes and two Pt electrodes). The device allows measurements to be taken in liquid phase of temperature, pH, nitrate concentrations and conductivity. These silicon transducers could be integrated with conditioning electronics to achieve an autonomous environmental sensor device.
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