Microstructure physique SiC Couches minces semi-conductrices Irradiation Oxides AFM Raman Photoluminescence Microstructure physics Thin film IR spectroscopy Energy transfer Electroluminescence Rare-earth ions Grazing incidence X-ray diffraction M-lines Doping Quantum-well Crystal structure Oxide interface Erbium Pulvérisation magnétron radiofréquence Semiconductors Nanoparticules Pulvérisation cathodique Electron paramagnetic resonance Conductivity Silicon nitride Laser pyrolysis Oxygen vacancies MoS2 Guide d'onde Oxide materials Rare-earth-doped materials Silicon photonics Feature erasure Nanostructuring Couches minces Cerium Si-rich silicon oxide Sputtering Refractive index FTIR Waveguide Phase transition Photovoltaic Friction Silicon nanocrystals Epitaxy Waveguides Terres rares Matériaux hybrides ADE-FDTD Al2O3 GENOMIQUE High-k dielectrics Liposomes Copper Cathodoluminescence CO adsorption Neodymium Computational electromagnetic methods Hafnium silicates RF magnetron sputtering Microstructure Hafnium silicate Si nanocluster Down-conversion Citric acid Fluorescence Luminescence Rare earths Lifetime Magnetron sputtering Films Silicon nanoclusters Infrared absorption Rare-earth- doped materials Nanostructured materials Radiofrequency magnetron sputtering Optical amplifiers Raman scattering Silicon XRD Rare-earth PZT Structural properties Nanostructure CoMoS Hillocks Nanostructures Silicium Atom probe tomography Nanoparticles Rare earth Reactive magnetron sputtering Multilayers Thin films Terbium HR STEM-HAADF