HDL Simulation of a Thermal Accelerometer for System Design
Résumé
This study concerns the integration of convective accelerometers on CMOS. The design approach is based on an HDL modeling of the sensing cell. The development of a monolithic system is then illustrated using multi-domain simulations within the microelectronic design environment. For illustration, the sensor equivalent input noise (i.e. the resolution) is then computed for various readout circuitry configurations.
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