Abstract : This study concerns the integration of convective accelerometers on CMOS. The design approach is based on an HDL modeling of the sensing cell. The development of a monolithic system is then illustrated using multi-domain simulations within the microelectronic design environment. For illustration, the sensor equivalent input noise (i.e. the resolution) is then computed for various readout circuitry configurations.
https://hal-lirmm.ccsd.cnrs.fr/lirmm-00102170
Contributor : Martine Peridier <>
Submitted on : Friday, September 29, 2006 - 11:57:21 AM Last modification on : Thursday, May 24, 2018 - 3:59:24 PM Long-term archiving on: : Tuesday, April 6, 2010 - 1:17:21 AM
Aboubacar Chaehoi, Laurent Latorre, Olivier Leman, Frédérick Mailly, Pascal Nouet. HDL Simulation of a Thermal Accelerometer for System Design. XX EUROSENSORS, Sep 2006, Göteborg (Sweden). ⟨lirmm-00102170⟩