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HDL Simulation of a Thermal Accelerometer for System Design

Aboubacar Chaehoi 1 Laurent Latorre 2 Olivier Leman 1 Frédérick Mailly 2 Pascal Nouet 2
1 LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
2 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : This study concerns the integration of convective accelerometers on CMOS. The design approach is based on an HDL modeling of the sensing cell. The development of a monolithic system is then illustrated using multi-domain simulations within the microelectronic design environment. For illustration, the sensor equivalent input noise (i.e. the resolution) is then computed for various readout circuitry configurations.
keyword : MEMS Aclerometer HDL Modeling
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00102170
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Submitted on : Friday, September 29, 2006 - 11:57:21 AM
Last modification on : Friday, October 22, 2021 - 3:07:36 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 1:17:21 AM

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  • HAL Id : lirmm-00102170, version 1

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

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Aboubacar Chaehoi, Laurent Latorre, Olivier Leman, Frédérick Mailly, Pascal Nouet. HDL Simulation of a Thermal Accelerometer for System Design. XX EUROSENSORS, Sep 2006, Göteborg (Sweden). ⟨lirmm-00102170⟩

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