Abstract : This study concerns the integration of convective accelerometers on CMOS. The design approach is based on an HDL modeling of the sensing cell. The development of a monolithic system is then illustrated using multi-domain simulations within the microelectronic design environment. For illustration, the sensor equivalent input noise (i.e. the resolution) is then computed for various readout circuitry configurations.
https://hal-lirmm.ccsd.cnrs.fr/lirmm-00102170
Contributeur : Martine Peridier
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Soumis le : vendredi 29 septembre 2006 - 11:57:21
Dernière modification le : jeudi 11 janvier 2018 - 06:27:18
Document(s) archivé(s) le : mardi 6 avril 2010 - 01:17:21
Aboubacar Chaehoi, Laurent Latorre, Olivier Leman, Frédérick Mailly, Pascal Nouet. HDL Simulation of a Thermal Accelerometer for System Design. XX EUROSENSORS, Sep 2006, Göteborg (Sweden), 2006. 〈lirmm-00102170〉
