Design of CMOS Cantilevers for Intertial Sensing - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Poster Year : 2005

Design of CMOS Cantilevers for Intertial Sensing

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Computer Science [cs]

Christine Carvalho De Matos  : Connect in order to contact the contributor

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00106001

Submitted on : Friday, October 13, 2006-10:22:45 AM

Last modification on : Friday, March 24, 2023-2:52:48 PM

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lirmm-00106001 , version 1 (13-10-2006)

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  • HAL Id : lirmm-00106001 , version 1

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Aboubacar Chaehoi, Laurent Latorre, Pascal Nouet. Design of CMOS Cantilevers for Intertial Sensing. EUSPEN: European Society for Precision Engineering and Nanotechnology, May 2005, Montpellier, France. 5th International Conference of the European Society for Precision Engineering and Nanotechnology, pp.341-344, 2005. ⟨lirmm-00106001⟩

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