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Poster communications

Design of CMOS Cantilevers for Intertial Sensing

Aboubacar Chaehoi 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Document type :
Poster communications
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00106001
Contributor : Christine Carvalho de Matos Connect in order to contact the contributor
Submitted on : Friday, October 13, 2006 - 10:22:45 AM
Last modification on : Friday, October 22, 2021 - 3:07:36 PM

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  • HAL Id : lirmm-00106001, version 1

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

Citation

Aboubacar Chaehoi, Laurent Latorre, Pascal Nouet. Design of CMOS Cantilevers for Intertial Sensing. EUSPEN: European Society for Precision Engineering and Nanotechnology, May 2005, Montpellier, France. 5th International Conference of the European Society for Precision Engineering and Nanotechnology, pp.341-344, 2005. ⟨lirmm-00106001⟩

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