Design of CMOS Cantilevers for Intertial Sensing - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Poster Year : 2005

Design of CMOS Cantilevers for Intertial Sensing

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lirmm-00106001 , version 1 (13-10-2006)

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  • HAL Id : lirmm-00106001 , version 1

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Aboubacar Chaehoi, Laurent Latorre, Pascal Nouet. Design of CMOS Cantilevers for Intertial Sensing. EUSPEN: European Society for Precision Engineering and Nanotechnology, May 2005, Montpellier, France. 5th International Conference of the European Society for Precision Engineering and Nanotechnology, pp.341-344, 2005. ⟨lirmm-00106001⟩
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