Aboubacar Chaehoi, Laurent Latorre, Pascal Nouet. Design of CMOS Cantilevers for Intertial Sensing.
EUSPEN: European Society for Precision Engineering and Nanotechnology, May 2005, Montpellier, France. 5th International Conference of the European Society for Precision Engineering and Nanotechnology, pp.341-344, 2005.
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