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Experimental and Finite-Element Study of Convective Accelerometer on CMOS

Abstract : This paper addresses the design of CMOS thermal accelerometers. A test-chip including the sensor and a signal conditioning circuit has been designed, fabricated and characterized. The obtained sensitivity is 375mV/g while resolution is estimated at 30mg. This test-chip is used to improve the modelling of heat transfer phenomenon in theses devices. FEM is successfully used as a first modelling approach.
Mots-clés : Test Conception
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00106544
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Submitted on : Monday, October 16, 2006 - 8:45:01 AM
Last modification on : Monday, October 11, 2021 - 1:24:09 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 7:47:23 PM

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  • HAL Id : lirmm-00106544, version 1

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Aboubacar Chaehoi, Laurent Latorre, Frédérick Mailly, Pascal Nouet. Experimental and Finite-Element Study of Convective Accelerometer on CMOS. EUROSENSORS, Sep 2005, Barcelona, Spain. ⟨lirmm-00106544⟩

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