Experimental and Finite-Element Study of Convective Accelerometer on CMOS - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2005

Experimental and Finite-Element Study of Convective Accelerometer on CMOS

Abstract

This paper addresses the design of CMOS thermal accelerometers. A test-chip including the sensor and a signal conditioning circuit has been designed, fabricated and characterized. The obtained sensitivity is 375mV/g while resolution is estimated at 30mg. This test-chip is used to improve the modelling of heat transfer phenomenon in theses devices. FEM is successfully used as a first modelling approach.

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Dates and versions

lirmm-00106544 , version 1 (16-10-2006)

Identifiers

  • HAL Id : lirmm-00106544 , version 1

Cite

Aboubacar Chaehoi, Laurent Latorre, Frédérick Mailly, Pascal Nouet. Experimental and Finite-Element Study of Convective Accelerometer on CMOS. EUROSENSORS, Sep 2005, Barcelona, Spain. ⟨lirmm-00106544⟩
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