Electrically-Induced Thermal Stimuli for MEMS Testing - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Papers Year : 2004

Electrically-Induced Thermal Stimuli for MEMS Testing

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Micro and nanotechnologies/Microelectronics

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00108904

Submitted on : Monday, October 23, 2006-12:57:12 PM

Last modification on : Friday, March 24, 2023-2:52:48 PM

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lirmm-00108904 , version 1 (23-10-2006)

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  • HAL Id : lirmm-00108904 , version 1

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Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet. Electrically-Induced Thermal Stimuli for MEMS Testing. ETS: European Test Symposium, May 2004, Ajaccio, Corsica, France. pp.60-65. ⟨lirmm-00108904⟩

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