Automated On-Wafer Characterization in Micro-Machined Resonators: Towards an Integrated Test Vehicle for Bulk Acoustic Wave Resonators (FBAR)

Abstract : Electrical on-wafer characterization in FBAR is automated by means of a wide-band parameter extraction algorithm, in order to define a complete characterization vehicle for FBAR and MEMS resonators. A model of FBAR-substrate losses is proposed and an automation algorithm implementing a multi-step least-squares strategy is presented. Extraction of the equivalent-circuit parameters is performed from experimental s-parameter data acquired by a microwave network analyzer. The results of FBAR and substrate characterization are presented, and the basis of an integrated test vehicle is discussed.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00200013
Contributor : Martine Peridier <>
Submitted on : Thursday, December 20, 2007 - 10:30:15 AM
Last modification on : Thursday, August 16, 2018 - 11:44:02 AM

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  • HAL Id : lirmm-00200013, version 1

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Humberto Campanella, Pascal Nouet, Pedro de Paco, Arantxa Uranga, Nuria Barniol, et al.. Automated On-Wafer Characterization in Micro-Machined Resonators: Towards an Integrated Test Vehicle for Bulk Acoustic Wave Resonators (FBAR). ICMTS'07: IEEE International Conference on Microelectronic Test Structures, Mar 2007, Tokyo, Japan, pp.157-161. ⟨lirmm-00200013⟩

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