Automated On-Wafer Characterization in Micro-Machined Resonators: Towards an Integrated Test Vehicle for Bulk Acoustic Wave Resonators (FBAR)
Résumé
Electrical on-wafer characterization in FBAR is automated by means of a wide-band parameter extraction algorithm, in order to define a complete characterization vehicle for FBAR and MEMS resonators. A model of FBAR-substrate losses is proposed and an automation algorithm implementing a multi-step least-squares strategy is presented. Extraction of the equivalent-circuit parameters is performed from experimental s-parameter data acquired by a microwave network analyzer. The results of FBAR and substrate characterization are presented, and the basis of an integrated test vehicle is discussed.