Design and Characterization of a Bulk-Acoustic-Resonator (FBAR) - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2007
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lirmm-00203361 , version 1 (09-01-2008)

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  • HAL Id : lirmm-00203361 , version 1

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Humberto Campanella, Arantxa Uranga, Pascal Nouet, Nuria Barniol, Luis Teres, et al.. Design and Characterization of a Bulk-Acoustic-Resonator (FBAR). MEMSWAVE'07: 8th International Symposium on RF MEMS and RF Microsystems, Jun 2007, Barcelone, Spain. ⟨lirmm-00203361⟩
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