Design and Characterization of a Bulk-Acoustic-Resonator (FBAR)

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00203361
Contributor : Martine Peridier <>
Submitted on : Wednesday, January 9, 2008 - 5:11:01 PM
Last modification on : Thursday, August 16, 2018 - 11:44:02 AM

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  • HAL Id : lirmm-00203361, version 1

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Humberto Campanella, Arantxa Uranga, Pascal Nouet, Nuria Barniol, Luis Teres, et al.. Design and Characterization of a Bulk-Acoustic-Resonator (FBAR). MEMSWAVE'07: 8th International Symposium on RF MEMS and RF Microsystems, Jun 2007, Barcelone, Spain. ⟨lirmm-00203361⟩

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