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Electrostatic Actuation of Microscale Liquid-Metal Droplets

Laurent Latorre 1 C.J. Kim J.V. Leeuwen P.P. Guzman Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268544
Contributor : Christine Carvalho de Matos <>
Submitted on : Tuesday, April 1, 2008 - 9:27:44 AM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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  • HAL Id : lirmm-00268544, version 1

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

Citation

Laurent Latorre, C.J. Kim, J.V. Leeuwen, P.P. Guzman, Pascal Nouet. Electrostatic Actuation of Microscale Liquid-Metal Droplets. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2002, 11 (4), pp.302-308. ⟨lirmm-00268544⟩

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