Design and Simulation of a CMOS MEMS Using Standard Microelectronic CAD Environment - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2003
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lirmm-00269546 , version 1 (03-04-2008)

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  • HAL Id : lirmm-00269546 , version 1

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Laurent Latorre, Vincent Beroulle, Pascal Nouet. Design and Simulation of a CMOS MEMS Using Standard Microelectronic CAD Environment. NANOTECH 2003 - Nanotechnology Conference and Trade Show, Feb 2003, San Francisco, CA, United States. pp.472-475. ⟨lirmm-00269546⟩
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