Design and Simulation of a CMOS MEMS Using Standard Microelectronic CAD Environment - Archive ouverte HAL Access content directly
Conference Papers Year : 2003

Design and Simulation of a CMOS MEMS Using Standard Microelectronic CAD Environment

(1) , (2) , (1)
1
2
Not file

Dates and versions

lirmm-00269546 , version 1 (03-04-2008)

Identifiers

  • HAL Id : lirmm-00269546 , version 1

Cite

Laurent Latorre, Vincent Beroulle, Pascal Nouet. Design and Simulation of a CMOS MEMS Using Standard Microelectronic CAD Environment. NANOTECH 2003 - Nanotechnology Conference and Trade Show, Feb 2003, San Francisco, CA, United States. pp.472-475. ⟨lirmm-00269546⟩
70 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More