Design & Simulation of a CMOS MEMS Using Standard Microelectronic CAD Environment

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Conference papers
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00269546
Contributor : Christine Carvalho de Matos <>
Submitted on : Thursday, April 3, 2008 - 8:21:46 AM
Last modification on : Wednesday, January 1, 2020 - 6:46:01 PM

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  • HAL Id : lirmm-00269546, version 1

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Laurent Latorre, Vincent Beroulle, Pascal Nouet. Design & Simulation of a CMOS MEMS Using Standard Microelectronic CAD Environment. NANOTECH'03: Nanotechnology Conference and Trade Show, San Francisco, CA (USA), pp. 472-475. ⟨lirmm-00269546⟩

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