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Micromachined Thermal Accelerometer without Proof Mass

Frédérick Mailly 1 Alain Giani 2, 3 André Boyer 2, 3
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
3 M2A - Matériaux, MicroCapteurs et Acoustique
IES - Institut d’Electronique et des Systèmes
Abstract : Recently, a new design of micromachined thermal accelerometers was the subject of new studies since they differ from all the other types of accelerometers by the absence of seismic mass and can provide a shock survival up to 50000 g. In this paper, we present the elements of theory which are necessary for the comprehension of the sensor principle and its design optimisation. Manufacturing stages and experimental results are also presented and the performances of the different sensors described in the literature are compared.
Keywords : Accelerometer MEMS
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Contributor : Frédérick Mailly <>
Submitted on : Friday, April 11, 2008 - 3:03:58 PM
Last modification on : Monday, July 5, 2021 - 3:44:09 PM

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Frédérick Mailly, Alain Giani, André Boyer. Micromachined Thermal Accelerometer without Proof Mass. Cornelius T. Leondes. MEMS/NEMS Handbook: Techniques and Applications, Springer US, pp.31-62, 2007, 978-0-387-24520-1 (Print) 978-0-387-25786-0 (Online). ⟨10.1007/0-387-25786-1_26⟩. ⟨lirmm-00272453⟩



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