Micromachined Thermal Accelerometer without Proof Mass

Frédérick Mailly 1 Alain Giani 2 André Boyer 2
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : Recently, a new design of micromachined thermal accelerometers was the subject of new studies since they differ from all the other types of accelerometers by the absence of seismic mass and can provide a shock survival up to 50000 g. In this paper, we present the elements of theory which are necessary for the comprehension of the sensor principle and its design optimisation. Manufacturing stages and experimental results are also presented and the performances of the different sensors described in the literature are compared.
Keywords : Accelerometer MEMS
Type de document :
Chapitre d'ouvrage
Cornelius T. Leondes. MEMS/NEMS Handbook: Techniques and Applications, Springer US, pp.31-62, 2007, 978-0-387-24520-1 (Print) 978-0-387-25786-0 (Online). 〈10.1007/0-387-25786-1_26〉
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00272453
Contributeur : Frédérick Mailly <>
Soumis le : vendredi 11 avril 2008 - 15:03:58
Dernière modification le : jeudi 11 janvier 2018 - 06:27:29

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Frédérick Mailly, Alain Giani, André Boyer. Micromachined Thermal Accelerometer without Proof Mass. Cornelius T. Leondes. MEMS/NEMS Handbook: Techniques and Applications, Springer US, pp.31-62, 2007, 978-0-387-24520-1 (Print) 978-0-387-25786-0 (Online). 〈10.1007/0-387-25786-1_26〉. 〈lirmm-00272453〉

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