Towards New Low-Cost Multi-Sensor Systems - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2008

Towards New Low-Cost Multi-Sensor Systems

Abstract

For non-critical applications, consumer electronics requires more and more sensing components such as pressure sensors, accelerometers, magnetometers, flowmeters, microphones... Generally, each of these sensors is manufactured with a dedicated technology that involves specific materials and process flows together with either surface or bulk micromachining. The final multi-sensor system is then assembled on a PCB resulting in high manufacturing cost. In this paper, we propose an alternative where various MEMS-based sensors may be fabricated by direct bulk micromachining of the passive silicon substrate used for System-In-Package integration
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Dates and versions

lirmm-00325075 , version 1 (26-09-2008)

Identifiers

  • HAL Id : lirmm-00325075 , version 1

Cite

Boris Alandry, Frédérick Mailly, Laurent Latorre, Fabrice Verjus, Olivier Garel, et al.. Towards New Low-Cost Multi-Sensor Systems. EUROSENSORS, Sep 2008, Desden, Germany. pp.549-552. ⟨lirmm-00325075⟩
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