Study of First-Order Thermal SIGMA-DELTA Architecture for Convective Accelerometers

Abstract : This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This “electro-physical” modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance.
keyword : MEMS
Type de document :
Communication dans un congrès
DTIP'08: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Apr 2008, pp.100-104, 2008
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00333632
Contributeur : Frédérick Mailly <>
Soumis le : jeudi 23 octobre 2008 - 16:49:25
Dernière modification le : jeudi 11 janvier 2018 - 06:27:19

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  • HAL Id : lirmm-00333632, version 1

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Olivier Leman, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Study of First-Order Thermal SIGMA-DELTA Architecture for Convective Accelerometers. DTIP'08: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Apr 2008, pp.100-104, 2008. 〈lirmm-00333632〉

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