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Study of First-Order Thermal SIGMA-DELTA Architecture for Convective Accelerometers

Abstract : This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This “electro-physical” modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance.
keyword : MEMS
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00333632
Contributor : Frédérick Mailly <>
Submitted on : Wednesday, September 4, 2019 - 7:25:27 PM
Last modification on : Wednesday, September 4, 2019 - 7:26:57 PM
Long-term archiving on: : Thursday, February 6, 2020 - 1:26:19 AM

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Olivier Leman, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Study of First-Order Thermal SIGMA-DELTA Architecture for Convective Accelerometers. DTIP: Design, Test, Integration and Packaging of MEMS/MOEMS, Apr 2008, Nice, France. pp.100-104, ⟨10.1109/DTIP.2008.4752961⟩. ⟨lirmm-00333632⟩

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