A Novel Method for Test and Calibration of Capacitive Accelerometers with a Fully Electrical Setup

Norbert Dumas 1 Florence Azaïs 1 Frédérick Mailly 1 Andrew Richardson 2 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : Test and calibration cost is a bottleneck to reduce the overall production cost of MEMS sensors. One main reason is the cost of generating non electrical test stimuli. Hence, replacing the functional multi-domain test equipments with electrical ones arouses interest. The focus of this paper is on sensitivity testing and calibration through fully electrical measurements. A new method based on analytical expressions of the sensitivity with respect to both physical parameters of the structure and electrical test parameters is proposed. The accuracy of the method is evaluated by mean of a high level model including global and intra-die mismatch variations. It is shown that an accurate estimation of the sensitivity can be achieved using only electrical measurements and that the dispersions on the sensitivity can be divided by about 7 after the calibration procedure. These results are promising enough for high volume production of low-cost sensors.
Type de document :
Communication dans un congrès
DDECS'08: 11th IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, Apr 2008, Bratislava, Slovaquie, pp.6, 2008, 〈10.1109/DDECS.2008.4538807〉
Liste complète des métadonnées

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00337873
Contributeur : Florence Azais <>
Soumis le : lundi 10 novembre 2008 - 09:40:35
Dernière modification le : jeudi 11 janvier 2018 - 02:08:13

Identifiants

Collections

Citation

Norbert Dumas, Florence Azaïs, Frédérick Mailly, Andrew Richardson, Pascal Nouet. A Novel Method for Test and Calibration of Capacitive Accelerometers with a Fully Electrical Setup. DDECS'08: 11th IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, Apr 2008, Bratislava, Slovaquie, pp.6, 2008, 〈10.1109/DDECS.2008.4538807〉. 〈lirmm-00337873〉

Partager

Métriques

Consultations de la notice

47