A Method for Electrical Calibration of MEMS Accelerometers Through Multivariate Regression

Norbert Dumas 1 Florence Azaïs 1 Frédérick Mailly 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : This paper is the follow-up of the research we conduct to find an alternative way to measure the sensitivity of capacitive MEMS accelerometers. The goal is to be able to perform production test and calibration using only an electrical test bench, i.e. without applying acceleration. In the previously published study, we introduced three parameters that can be measured through electrical means and that are related to the accelerometer sensitivity through analytical expressions. However some restrictive assumptions were made on the conditioning electronic of the accelerometer. In this paper, the design for test capability needed to implement the measurement is discussed and improvement of the method is presented. It is based on a new set of electrical parameters that can be more easily measured and a MARS regression algorithm to find the relation between these parameters and the sensitivity. The method is evaluated through Monte Carlo simulations.
Type de document :
Communication dans un congrès
IMS3TW'09: IEEE 15th Mixed-Signals, Sensors and Systems Test Workshop, Jun 2009, IEEE, pp.N/A, 2009
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00399110
Contributeur : Martine Peridier <>
Soumis le : jeudi 25 juin 2009 - 16:38:44
Dernière modification le : jeudi 24 mai 2018 - 15:59:24

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  • HAL Id : lirmm-00399110, version 1

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Norbert Dumas, Florence Azaïs, Frédérick Mailly, Pascal Nouet. A Method for Electrical Calibration of MEMS Accelerometers Through Multivariate Regression. IMS3TW'09: IEEE 15th Mixed-Signals, Sensors and Systems Test Workshop, Jun 2009, IEEE, pp.N/A, 2009. 〈lirmm-00399110〉

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