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A MEMS-Based Multi-Sensor Platform for Consumer Applications

Boris Alandry 1 Frédérick Mailly 2 Laurent Latorre 2 Pascal Nouet 2
1 LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
2 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : This paper introduces an original MEMS multi-sensor platform for consumer applications. The whole set of sensors have been designed. manufactured and tested showing interesting performances for various type of applications. A demonstrator of a 3D orientation determination system has also been programmed on the platform proving the interest of such device.
keyword : MEMS
Document type :
Conference papers
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00423604
Contributor : Frédérick Mailly Connect in order to contact the contributor
Submitted on : Monday, October 12, 2009 - 11:04:09 AM
Last modification on : Friday, October 22, 2021 - 3:07:39 PM

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  • HAL Id : lirmm-00423604, version 1

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

Citation

Boris Alandry, Frédérick Mailly, Laurent Latorre, Pascal Nouet. A MEMS-Based Multi-Sensor Platform for Consumer Applications. PRIME'09: Research in Microelectronics and Electronics, Jul 2009, Cork, Ireland. pp.320-323. ⟨lirmm-00423604⟩

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