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Conference Papers Year : 2009

A MEMS-Based Multi-Sensor Platform for Consumer Applications

Abstract

This paper introduces an original MEMS multi-sensor platform for consumer applications. The whole set of sensors have been designed. manufactured and tested showing interesting performances for various type of applications. A demonstrator of a 3D orientation determination system has also been programmed on the platform proving the interest of such device.

Keywords

MEMS

Domains

Micro and nanotechnologies/Microelectronics

Frédérick Mailly  : Connect in order to contact the contributor

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00423604

Submitted on : Monday, October 12, 2009-11:04:09 AM

Last modification on : Friday, March 24, 2023-2:52:52 PM

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Dates and versions

lirmm-00423604 , version 1 (12-10-2009)

Identifiers

  • HAL Id : lirmm-00423604 , version 1

Cite

Boris Alandry, Frédérick Mailly, Laurent Latorre, Pascal Nouet. A MEMS-Based Multi-Sensor Platform for Consumer Applications. PRIME'09: Research in Microelectronics and Electronics, Jul 2009, Cork, Ireland. pp.320-323. ⟨lirmm-00423604⟩

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CNRS SYSMIC LIRMM LIRMM_MIC MIC MIPS UNIV-MONTPELLIER
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