Noise Analysis of a First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Journal Articles Analog Integrated Circuits and Signal Processing Year : 2010

Noise Analysis of a First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers

Abstract

This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal properties of the sensor, a first order sigma-delta modulator is built. This “electro-physical” modulator realizes an analog-to-digital conversion of the acceleration signal. Besides, the feedback mode of operation improves the sensor overall performance.

Dates and versions

lirmm-00432759 , version 1 (17-11-2009)

Identifiers

Cite

Olivier Leman, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Noise Analysis of a First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers. Analog Integrated Circuits and Signal Processing, 2010, 63 (3), pp.415-423. ⟨10.1007/s10470-009-9419-2⟩. ⟨lirmm-00432759⟩
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