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Noise Analysis of a First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers

Abstract : This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal properties of the sensor, a first order sigma-delta modulator is built. This “electro-physical” modulator realizes an analog-to-digital conversion of the acceleration signal. Besides, the feedback mode of operation improves the sensor overall performance.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00432759
Contributor : Frédérick Mailly <>
Submitted on : Tuesday, November 17, 2009 - 11:12:10 AM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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Olivier Leman, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Noise Analysis of a First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers. Analog Integrated Circuits and Signal Processing, Springer Verlag, 2010, 63 (3), pp.415-423. ⟨10.1007/s10470-009-9419-2⟩. ⟨lirmm-00432759⟩

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