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Design of a Smart CMOS High-Voltage Driver for Electrostatic MEMS Switches

Norbert Dumas 1 Laurent Latorre 1 Frédérick Mailly 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00489031
Contributor : Martine Peridier <>
Submitted on : Thursday, June 3, 2010 - 4:21:46 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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  • HAL Id : lirmm-00489031, version 1

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Norbert Dumas, Laurent Latorre, Frédérick Mailly, Pascal Nouet. Design of a Smart CMOS High-Voltage Driver for Electrostatic MEMS Switches. DTIP'10: Design, Test, Integration and Packaging of MEMS/MOEMS, Seville, Spain. pp.44-47. ⟨lirmm-00489031⟩

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