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Nonlinear Behaviour of a Micromachined SOI Device for Energy Harvesting Application

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00489036
Contributor : Martine Peridier <>
Submitted on : Thursday, June 3, 2010 - 4:30:51 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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  • HAL Id : lirmm-00489036, version 1

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Bruno Ando, Salvatore Baglio, Norbert Dumas, Laurent Latorre, Pascal Nouet, et al.. Nonlinear Behaviour of a Micromachined SOI Device for Energy Harvesting Application. DTIP'10: Design, Test, Integration and Packaging of MEMS/MOEMS, May 2010, Seville, Spain. pp.263-265. ⟨lirmm-00489036⟩

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