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A MEMS Convective Accelerometer Equipped with On-Chip Facilities for Sensitivity Electrical Calibration

Abstract : In this paper, we propose an alternate electrical-only strategy to perform both test and calibration of MEMS convective accelerometers' sensitivity. The idea is calibrate device sensitivity through the adjustment of the power dissipated in the heater element. For this, the system is equipped with an on-chip programmable digital pulse modulated generator and an iterative search procedure based on simple impedance measurements is implemented. The method is evaluated through Monte-Carlo simulations considering typical process variations and results are presented to demonstrate the potentialities of the technique.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00702759
Contributor : Florence Azais <>
Submitted on : Thursday, May 31, 2012 - 11:45:45 AM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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Ahmed Rekik, Florence Azaïs, Norbert Dumas, Frédérick Mailly, Pascal Nouet. A MEMS Convective Accelerometer Equipped with On-Chip Facilities for Sensitivity Electrical Calibration. IMS3TW'11: IEEE International Mixed-Signals, Sensors and Systems Test Workshop, United States. pp.82-87, ⟨10.1109/IMS3TW.2011.21⟩. ⟨lirmm-00702759⟩

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