Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy

Abstract : In this paper, we explore the use of an adaptive electrical calibration strategy in the context of design-for-manufacturing for MEMS convective accelerometers. The calibration principle relies on the adjustment of the heater power level such that sensitivity is set to a given target value. The idea is to define multiple sensitivity targets in order to improve production yield and to insert a criterion on power consumption. Different device binning can then be achieved depending on test limit settings. Results obtained from Monte-Carlo simulation are presented to demonstrate potentialities of the technique.
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Communication dans un congrès
LATW: Latin American Test Workshop, Apr 2012, Quito, Ecuador. 13th Latin American Test Workshop, 2012, 〈http://www-elec.inaoep.mx/LATW2012/〉. 〈10.1109/LATW.2012.6261237〉
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00803451
Contributeur : Florence Azais <>
Soumis le : samedi 21 janvier 2017 - 21:08:12
Dernière modification le : jeudi 24 mai 2018 - 15:59:24
Document(s) archivé(s) le : samedi 22 avril 2017 - 13:03:01

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Ahmed Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet. Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy. LATW: Latin American Test Workshop, Apr 2012, Quito, Ecuador. 13th Latin American Test Workshop, 2012, 〈http://www-elec.inaoep.mx/LATW2012/〉. 〈10.1109/LATW.2012.6261237〉. 〈lirmm-00803451〉

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