Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy

Abstract : In this paper, we explore the use of an adaptive electrical calibration strategy in the context of design-for-manufacturing for MEMS convective accelerometers. The calibration principle relies on the adjustment of the heater power level such that sensitivity is set to a given target value. The idea is to define multiple sensitivity targets in order to improve production yield and to insert a criterion on power consumption. Different device binning can then be achieved depending on test limit settings. Results obtained from Monte-Carlo simulation are presented to demonstrate potentialities of the technique.
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Ahmed Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet. Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy. LATW: Latin American Test Workshop, Apr 2012, Quito, Ecuador. ⟨10.1109/LATW.2012.6261237⟩. ⟨lirmm-00803451⟩

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