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Improvement of Power Supply Rejection Ratio in Wheatstone-bridge based piezoresistive MEMS

El Mehdi Boujamaa 1 Frédérick Mailly 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : This paper deals with the design of MEMS-based sensors with piezoresistive transduction. It is demonstrated that when the sensor topology does not allow a perfect matching of resistances in the conditioning circuit (typically a Wheatstone bridge), the resolution of the system is limited by the ability to reject power supply noise. As this ability increases when the output offset of the bridge decreases, the proposed architecture implements a feedback loop to control MOS transistors inserted in the Wheatstone bridge to compensate resistor mismatches. This zero-offset bridge exhibits a very good offset cancellation and therefore a better resolution.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00803645
Contributor : Frédérick Mailly <>
Submitted on : Friday, March 22, 2013 - 3:00:50 PM
Last modification on : Tuesday, August 27, 2019 - 3:12:02 PM

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El Mehdi Boujamaa, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Improvement of Power Supply Rejection Ratio in Wheatstone-bridge based piezoresistive MEMS. Analog Integrated Circuits and Signal Processing, Springer Verlag, 2012, 71 (1), pp.1-9. ⟨10.1007/s10470-010-9504-6⟩. ⟨lirmm-00803645⟩

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