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Design of a Monolithic 3-axis Thermal Convective Accelerometer

Huy Binh Nguyen 1 Frédérick Mailly 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : This paper presents the design of a monolithic 3- axis thermal accelerometer using a standard CMOS process. Based on free convection in a sealed cavity, the sensing principle is well known and many examples of single and dual-axis MEMS accelerometers can be found in the literature. More recently, Finite Element Modeling has demonstrated the feasibility of a fully integrated 3-axis sensor manufactured with a simple post-process to partially etch silicon bulk of a CMOS die. A prototype was designed and fabricated; this paper presents the sensing cell, its associated conditioning electronics and preliminary characterization.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00814222
Contributor : Frédérick Mailly <>
Submitted on : Wednesday, April 17, 2013 - 9:29:29 AM
Last modification on : Thursday, March 5, 2020 - 5:55:01 PM

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  • HAL Id : lirmm-00814222, version 1

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Huy Binh Nguyen, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Design of a Monolithic 3-axis Thermal Convective Accelerometer. DTIP: Design, Test, Integration and Packaging, Apr 2013, Barcelona, Spain. pp.235-238. ⟨lirmm-00814222⟩

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