Design of a Monolithic 3-axis Thermal Convective Accelerometer - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2013

Design of a Monolithic 3-axis Thermal Convective Accelerometer

Abstract

This paper presents the design of a monolithic 3- axis thermal accelerometer using a standard CMOS process. Based on free convection in a sealed cavity, the sensing principle is well known and many examples of single and dual-axis MEMS accelerometers can be found in the literature. More recently, Finite Element Modeling has demonstrated the feasibility of a fully integrated 3-axis sensor manufactured with a simple post-process to partially etch silicon bulk of a CMOS die. A prototype was designed and fabricated; this paper presents the sensing cell, its associated conditioning electronics and preliminary characterization.
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Dates and versions

lirmm-00814222 , version 1 (17-04-2013)

Identifiers

  • HAL Id : lirmm-00814222 , version 1

Cite

Huy Binh Nguyen, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Design of a Monolithic 3-axis Thermal Convective Accelerometer. DTIP: Design, Test, Integration and Packaging, Apr 2013, Barcelona, Spain. pp.235-238. ⟨lirmm-00814222⟩
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