Design of a Monolithic 3-axis Thermal Convective Accelerometer - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Accéder directement au contenu
Communication Dans Un Congrès Année : 2013

Design of a Monolithic 3-axis Thermal Convective Accelerometer

Résumé

This paper presents the design of a monolithic 3- axis thermal accelerometer using a standard CMOS process. Based on free convection in a sealed cavity, the sensing principle is well known and many examples of single and dual-axis MEMS accelerometers can be found in the literature. More recently, Finite Element Modeling has demonstrated the feasibility of a fully integrated 3-axis sensor manufactured with a simple post-process to partially etch silicon bulk of a CMOS die. A prototype was designed and fabricated; this paper presents the sensing cell, its associated conditioning electronics and preliminary characterization.
Fichier non déposé

Dates et versions

lirmm-00814222 , version 1 (17-04-2013)

Identifiants

  • HAL Id : lirmm-00814222 , version 1

Citer

Huy Binh Nguyen, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Design of a Monolithic 3-axis Thermal Convective Accelerometer. DTIP: Design, Test, Integration and Packaging, Apr 2013, Barcelona, Spain. pp.235-238. ⟨lirmm-00814222⟩
138 Consultations
0 Téléchargements

Partager

Gmail Facebook X LinkedIn More