FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity

Huy Binh Nguyen 1 Frédérick Mailly 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity. The principle is well known and the first MEMS implementations were reported in the late 90's. Since that time, many single-axis or dual-axis sensors were reported. The device presented in this paper is the first reported 3-axis sensor manufactured in a standard CMOS technology. Therefore, the goal of this study is to demonstrate the feasibility of a third sensitive axis on a single device and to provide MEMS designers with a compact model and the main parameters that govern the sensitivity.
Type de document :
Poster
MSM'2012: Modeling & Simulation of Microsystems, Microtech Conference & Expo, Santa Clara, United States. pp.4, 2012
Liste complète des métadonnées

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00814247
Contributeur : Frédérick Mailly <>
Soumis le : mardi 16 avril 2013 - 17:12:56
Dernière modification le : jeudi 11 janvier 2018 - 02:08:11

Identifiants

  • HAL Id : lirmm-00814247, version 1

Collections

Citation

Huy Binh Nguyen, Frédérick Mailly, Laurent Latorre, Pascal Nouet. FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity. MSM'2012: Modeling & Simulation of Microsystems, Microtech Conference & Expo, Santa Clara, United States. pp.4, 2012. 〈lirmm-00814247〉

Partager

Métriques

Consultations de la notice

137