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HAL-LIRMM - Open Archive |  |
Poster communications
FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity
Abstract : Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity. The principle is well known and the first MEMS implementations were reported in the late 90's. Since that time, many single-axis or dual-axis sensors were reported. The device presented in this paper is the first reported 3-axis sensor manufactured in a standard CMOS technology. Therefore, the goal of this study is to demonstrate the feasibility of a third sensitive axis on a single device and to provide MEMS designers with a compact model and the main parameters that govern the sensitivity.
https://hal-lirmm.ccsd.cnrs.fr/lirmm-00814247
Contributor : Frédérick Mailly <>
Submitted on : Tuesday, April 16, 2013 - 5:12:56 PM
Last modification on : Thursday, March 5, 2020 - 5:55:02 PM
Contributor : Frédérick Mailly <>
Submitted on : Tuesday, April 16, 2013 - 5:12:56 PM
Last modification on : Thursday, March 5, 2020 - 5:55:02 PM