FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity

Huy Binh Nguyen 1 Frédérick Mailly 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity. The principle is well known and the first MEMS implementations were reported in the late 90's. Since that time, many single-axis or dual-axis sensors were reported. The device presented in this paper is the first reported 3-axis sensor manufactured in a standard CMOS technology. Therefore, the goal of this study is to demonstrate the feasibility of a third sensitive axis on a single device and to provide MEMS designers with a compact model and the main parameters that govern the sensitivity.
Type de document :
Poster
MSM'2012: Modeling & Simulation of Microsystems, Microtech Conference & Expo, Santa Clara, United States. pp.4, 2012
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00814247
Contributeur : Frédérick Mailly <>
Soumis le : mardi 16 avril 2013 - 17:12:56
Dernière modification le : jeudi 28 juin 2018 - 17:53:17

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  • HAL Id : lirmm-00814247, version 1

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Huy Binh Nguyen, Frédérick Mailly, Laurent Latorre, Pascal Nouet. FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity. MSM'2012: Modeling & Simulation of Microsystems, Microtech Conference & Expo, Santa Clara, United States. pp.4, 2012. 〈lirmm-00814247〉

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