FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Poster Year : 2012

FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity

Abstract

Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity. The principle is well known and the first MEMS implementations were reported in the late 90's. Since that time, many single-axis or dual-axis sensors were reported. The device presented in this paper is the first reported 3-axis sensor manufactured in a standard CMOS technology. Therefore, the goal of this study is to demonstrate the feasibility of a third sensitive axis on a single device and to provide MEMS designers with a compact model and the main parameters that govern the sensitivity.
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Dates and versions

lirmm-00814247 , version 1 (16-04-2013)

Identifiers

  • HAL Id : lirmm-00814247 , version 1

Cite

Huy Binh Nguyen, Frédérick Mailly, Laurent Latorre, Pascal Nouet. FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity. MSM'2012: Modeling & Simulation of Microsystems, Microtech Conference & Expo, Santa Clara, United States. pp.4, 2012. ⟨lirmm-00814247⟩
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