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Poster communications

FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity

Huy Binh Nguyen 1 Frédérick Mailly 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity. The principle is well known and the first MEMS implementations were reported in the late 90's. Since that time, many single-axis or dual-axis sensors were reported. The device presented in this paper is the first reported 3-axis sensor manufactured in a standard CMOS technology. Therefore, the goal of this study is to demonstrate the feasibility of a third sensitive axis on a single device and to provide MEMS designers with a compact model and the main parameters that govern the sensitivity.
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Poster communications
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Contributor : Frédérick Mailly Connect in order to contact the contributor
Submitted on : Tuesday, April 16, 2013 - 5:12:56 PM
Last modification on : Friday, October 22, 2021 - 3:07:37 PM


  • HAL Id : lirmm-00814247, version 1



Huy Binh Nguyen, Frédérick Mailly, Laurent Latorre, Pascal Nouet. FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity. MSM'2012: Modeling & Simulation of Microsystems, Microtech Conference & Expo, Santa Clara, United States. pp.4, 2012. ⟨lirmm-00814247⟩



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