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Conference Papers Year : 2012

Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors

Abstract

Interest for cheap integrated sensors is constantly growing with the development of mobile consumer prod- ucts or disposable medical appliances. In this context, low-cost integration of multi-sensor systems making use of standard CMOS technology together with cheap post-process enables the batch fabrication of monolithic multi-sensor circuits that include accelerometers, magne- tometers, microphones, temperature, pressure sensors and many other physical sensors.
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Dates and versions

lirmm-00814386 , version 1 (17-04-2013)

Identifiers

  • HAL Id : lirmm-00814386 , version 1

Cite

Frédérick Mailly, Laurent Latorre, Pascal Nouet. Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors. SSDM'2012: International Conference on Solid State Devices and Materials, Sep 2012, Kyoto, Japan. pp.1117-1119. ⟨lirmm-00814386⟩
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