Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors

Frédérick Mailly 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : Interest for cheap integrated sensors is constantly growing with the development of mobile consumer prod- ucts or disposable medical appliances. In this context, low-cost integration of multi-sensor systems making use of standard CMOS technology together with cheap post-process enables the batch fabrication of monolithic multi-sensor circuits that include accelerometers, magne- tometers, microphones, temperature, pressure sensors and many other physical sensors.
Type de document :
Communication dans un congrès
SSDM'2012: International Conference on Solid State Devices and Materials, Sep 2012, Kyoto, Japan. pp.1117-1119, 2012, 〈http://www.ssdm.jp/2012/〉
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00814386
Contributeur : Frédérick Mailly <>
Soumis le : mercredi 17 avril 2013 - 09:27:02
Dernière modification le : jeudi 24 mai 2018 - 15:59:24

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  • HAL Id : lirmm-00814386, version 1

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Frédérick Mailly, Laurent Latorre, Pascal Nouet. Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors. SSDM'2012: International Conference on Solid State Devices and Materials, Sep 2012, Kyoto, Japan. pp.1117-1119, 2012, 〈http://www.ssdm.jp/2012/〉. 〈lirmm-00814386〉

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