Skip to Main content Skip to Navigation
Conference papers

Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors

Frédérick Mailly 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : Interest for cheap integrated sensors is constantly growing with the development of mobile consumer prod- ucts or disposable medical appliances. In this context, low-cost integration of multi-sensor systems making use of standard CMOS technology together with cheap post-process enables the batch fabrication of monolithic multi-sensor circuits that include accelerometers, magne- tometers, microphones, temperature, pressure sensors and many other physical sensors.
Complete list of metadatas

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00814386
Contributor : Frédérick Mailly <>
Submitted on : Wednesday, April 17, 2013 - 9:27:02 AM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

Identifiers

  • HAL Id : lirmm-00814386, version 1

Collections

Citation

Frédérick Mailly, Laurent Latorre, Pascal Nouet. Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors. SSDM'2012: International Conference on Solid State Devices and Materials, Sep 2012, Kyoto, Japan. pp.1117-1119. ⟨lirmm-00814386⟩

Share

Metrics

Record views

128