Proceedings of the 18th Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2016)

Benoit Charlot; Yoshio Mita; Pascal Nouet; Francis Pressecq; Marta Rencz; Peter Schneider; Niels Tas

Proceedings Year : 2016

Proceedings of the 18th Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2016)

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Benoit Charlot

Function : Author
PersonId : 17289
IdHAL : benoit-charlot
ORCID : 0000-0001-7178-1949
IdRef : 089073185

Institut d’Electronique et des Systèmes

Matériaux, MicroCapteurs et Acoustique

Yoshio Mita

Function : Author

The University of Tokyo

Pascal Nouet

Function : Author
PersonId : 6242
IdHAL : pascal-nouet
ORCID : 0000-0003-2137-2623
IdRef : 079135196

Conception et Test de Systèmes MICroélectroniques

CV

Francis Pressecq

Function : Author

Centre National d'Études Spatiales [Toulouse]

Marta Rencz

Function : Author

Budapest University of Technology and Economics [Budapest]

Peter Schneider

Function : Author

Technische Universität Dresden = Dresden University of Technology

Niels Tas

Function : Author

Domains

Micro and nanotechnologies/Microelectronics

Caroline Lebrun : Connect in order to contact the contributor

https://hal-lirmm.ccsd.cnrs.fr/lirmm-01433526

Submitted on : Thursday, January 12, 2017-4:42:27 PM

Last modification on : Tuesday, October 31, 2023-10:22:07 AM

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lirmm-01433526 , version 1 (12-01-2017)

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HAL Id : lirmm-01433526 , version 1

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Benoit Charlot, Yoshio Mita, Pascal Nouet, Francis Pressecq, Marta Rencz, et al.. Proceedings of the 18th Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2016). DTIP: Design, Test, Integration and Packaging of MEMS/MOEMS, May 2016, Budapest, Hungary. IEEE, pp.329, 2016. ⟨lirmm-01433526⟩

Proceedings of the 18th Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2016)

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