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TCAD Simulation Framework of Gas Desorption in CNT FET NO 2 Sensors

Stefania Carapezzi 1, 2 Susanna Reggiani 2 Elena Gnani 2 Antonio Gnudi 2
1 SmartIES - Smart Integrated Electronic Systems
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : A technology computer-aided design (TCAD) simulation framework of gas desorption induced by self-heating in carbon nanotube (CNT) field effect transistor (FET) gas sensors is presented. Its key feature is the use of temperature profiles extracted from electrothermal simulations to determine the change of the effective gas-induced doping concentration during the gas desorption phase. The approach allows to investigate the impact of geometrical and physical parameters, in particular the ones related to contacts, on the self-heating desorption process. The main conclusion is that, due to the nonuniform self-heating temperature profile, the near-threshold part of the IDS-VGS curves recover their pristine aspect faster than the rest of the characteristics.
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Submitted on : Thursday, July 15, 2021 - 4:59:02 PM
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Stefania Carapezzi, Susanna Reggiani, Elena Gnani, Antonio Gnudi. TCAD Simulation Framework of Gas Desorption in CNT FET NO 2 Sensors. IEEE Transactions on Electron Devices, Institute of Electrical and Electronics Engineers, 2020, 67 (11), pp.4682-4686. ⟨10.1109/TED.2020.3021995⟩. ⟨lirmm-03287545⟩



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