Modeling of a CMOS Convective Accelerometer for HDL Integration

Abstract : This paper introduces an analytical modeling of a convection heat CMOS accelerometer. The modeling approach relies on the use of fundamental results and is validated using both experimental data issued from test vehicles and FEM analysis. Since such accelerometers are based on the CMOS technology, the proposed model is intended for further HDL integration. The objective is to enable system level simulation and optimization within standard microelectronic CAD software.
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Communication dans un congrès
ESSDERC'06: 36th European Solid-State Device Research Conference - ESSCIRC'06: 32nd European Solid-State Circuits Conference, Sep 2006, Montreux (Switzerland), pp.134-137, 2006
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00102127
Contributeur : Martine Peridier <>
Soumis le : vendredi 29 septembre 2006 - 10:44:18
Dernière modification le : jeudi 11 janvier 2018 - 06:27:18
Document(s) archivé(s) le : mardi 6 avril 2010 - 01:16:56

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Laurent Latorre, Frédérick Mailly, Pascal Nouet, Olivier Leman, Aboubacar Chaehoi. Modeling of a CMOS Convective Accelerometer for HDL Integration. ESSDERC'06: 36th European Solid-State Device Research Conference - ESSCIRC'06: 32nd European Solid-State Circuits Conference, Sep 2006, Montreux (Switzerland), pp.134-137, 2006. 〈lirmm-00102127〉

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