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Offset and Noise Rejection Analysis in CMOS Piezoresistive Sensors

Norbert Dumas 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : In this paper, the use of piezoresistive CMOS beams is addressed with a particular focus on offset and noise rejection problems in a Wheatstone bridge. Using a test-chip (a magnetometer), the mismatch between resistors (on the substrate) and gauges (suspended) is experimentally studied. Both thermal and mechanical causes are analysed. Finally, mismatch cancellation techniques are reported.
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Submitted on : Monday, October 16, 2006 - 8:45:00 AM
Last modification on : Friday, October 22, 2021 - 3:07:36 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 7:47:16 PM



  • HAL Id : lirmm-00106543, version 1



Norbert Dumas, Laurent Latorre, Pascal Nouet. Offset and Noise Rejection Analysis in CMOS Piezoresistive Sensors. EUROSENSORS, Sep 2005, Barcelona, Spain. ⟨lirmm-00106543⟩



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