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Conference Papers Year : 2005

Offset and Noise Rejection Analysis in CMOS Piezoresistive Sensors

Abstract

In this paper, the use of piezoresistive CMOS beams is addressed with a particular focus on offset and noise rejection problems in a Wheatstone bridge. Using a test-chip (a magnetometer), the mismatch between resistors (on the substrate) and gauges (suspended) is experimentally studied. Both thermal and mechanical causes are analysed. Finally, mismatch cancellation techniques are reported.
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Dates and versions

lirmm-00106543 , version 1 (16-10-2006)

Identifiers

  • HAL Id : lirmm-00106543 , version 1

Cite

Norbert Dumas, Laurent Latorre, Pascal Nouet. Offset and Noise Rejection Analysis in CMOS Piezoresistive Sensors. EUROSENSORS, Sep 2005, Barcelona, Spain. ⟨lirmm-00106543⟩
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