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Conference Papers Year : 2004

A CMOS MEMS Accelerometer with Bulk Micromachining

Abstract

Due to the lack of important seismic mass, CMOS-FSBM cantilevers have never been carefully considered for intertial sensing. This paper demonstrates that such beams can be used for acceleration measurement. A dedicated cantilever has been designed and fabricated. experimental results have demonstrated a sensitivity of about 22.4 mV/g.
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Dates and versions

lirmm-00108794 , version 1 (23-10-2006)

Identifiers

  • HAL Id : lirmm-00108794 , version 1

Cite

Aboubacar Chaehoi, Laurent Latorre, Pascal Nouet. A CMOS MEMS Accelerometer with Bulk Micromachining. EUROSENSORS, Sep 2004, Rome, Italy. ⟨lirmm-00108794⟩
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