A CMOS MEMS Accelerometer with Bulk Micromachining

Abstract : Due to the lack of important seismic mass, CMOS-FSBM cantilevers have never been carefully considered for intertial sensing. This paper demonstrates that such beams can be used for acceleration measurement. A dedicated cantilever has been designed and fabricated. experimental results have demonstrated a sensitivity of about 22.4 mV/g.
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Communication dans un congrès
EUROSENSORS'04: 18th European Conference on Solid-State Transducers, Sep 2004, Rome, Italy. 2004
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00108794
Contributeur : Christine Carvalho de Matos <>
Soumis le : lundi 23 octobre 2006 - 12:56:02
Dernière modification le : jeudi 24 mai 2018 - 15:59:24
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  • HAL Id : lirmm-00108794, version 1

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Aboubacar Chaehoi, Laurent Latorre, Pascal Nouet. A CMOS MEMS Accelerometer with Bulk Micromachining. EUROSENSORS'04: 18th European Conference on Solid-State Transducers, Sep 2004, Rome, Italy. 2004. 〈lirmm-00108794〉

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