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A CMOS MEMS Accelerometer with Bulk Micromachining

Abstract : Due to the lack of important seismic mass, CMOS-FSBM cantilevers have never been carefully considered for intertial sensing. This paper demonstrates that such beams can be used for acceleration measurement. A dedicated cantilever has been designed and fabricated. experimental results have demonstrated a sensitivity of about 22.4 mV/g.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00108794
Contributor : Christine Carvalho de Matos <>
Submitted on : Monday, October 23, 2006 - 12:56:02 PM
Last modification on : Saturday, September 21, 2019 - 4:03:49 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 6:15:24 PM

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  • HAL Id : lirmm-00108794, version 1

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Aboubacar Chaehoi, Laurent Latorre, Pascal Nouet. A CMOS MEMS Accelerometer with Bulk Micromachining. EUROSENSORS, Sep 2004, Rome, Italy. ⟨lirmm-00108794⟩

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